
FALCO-WAFER: Feature-Aware Lightweight Contextual Detector for Wafer Defect Detection
IEEE International Test Conference in Asia (ITC-Asia), pp. 43–47, 2025.
A lightweight, feature-aware detector for semiconductor wafer inspection. Evaluated on 5,723 labeled defect images: 90.7% AP@0.5, 7.19% false-negative rate, and 13.3M parameters.
About this work
The architecture combines a Multi-Scale Depthwise Block for efficient texture encoding with a Token-Energy Diagonal Attention head for feature refinement. The work addresses subtle, low-contrast wafer defects while keeping the model compact for manufacturing inspection. My research work included data preparation, model benchmarking, architecture improvement, and scientific writing.
Cite this work
@inproceedings{zhang2025falcowafer,
title={FALCO-WAFER: Feature-Aware Lightweight Contextual Detector for Wafer Defect Detection},
author={Zhang, Haotian and Cao, Shurong and Zou, Ningmu},
booktitle={2025 IEEE International Test Conference in Asia (ITC-Asia)},
pages={43--47},
year={2025},
doi={10.1109/ITC-Asia67627.2025.00016}
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