Device physics · Simulation
Vacuum MOSFET sensing
A semiconductor sensing concept explored through device architecture, multiphysics modeling, and simulation verification.
Device concept
The project explores a miniaturized vacuum gauge that combines semiconductor-device amplification with pressure-sensitive structures.
My contribution
I worked on COMSOL model development, architecture refinement, simulation verification, and model integration in a national-level undergraduate innovation project.
Granted patent
Co-inventor: A capacitive semiconductor miniature vacuum gauge and vacuum detection method. Chinese patent CN120352074B, granted 26 September 2025.